SYSTEM, VORRICHTUNG UND VERFAHREN ZUR ÜBERWACHUNG EINES OBERFLÄCHENPROFILS UND DICKENMESSUNG IN DÜNNSCHICHTEN | SYSTÈME, APPAREIL ET PROCÉDÉ DE SURVEILLANCE DE PROFIL DE SURFACE ET DE MESURE D'ÉPAISSEUR DANS DES COUCHES MINCES | SYSTEM, APPARATUS AND METHOD FOR MONITORING OF SURFACE PROFILE AND THICKNESS MEASUREMENT IN THIN FILMS
SYSTEM, VORRICHTUNG UND VERFAHREN ZUR ÜBERWACHUNG EINES OBERFLÄCHENPROFILS UND DICKENMESSUNG IN DÜNNSCHICHTEN | SYSTÈME, APPAREIL ET PROCÉDÉ DE SURVEILLANCE DE PROFIL DE SURFACE ET DE MESURE D'ÉPAISSEUR DANS DES COUCHES MINCES | SYSTEM, APPARATUS AND METHOD FOR MONITORING OF SURFACE PROFILE AND THICKNESS MEASUREMENT IN THIN FILMS
INDIAN INSTITUTE OF TECHNOLOGY GUWAHATI,Guwahati, Assam,IN | THE SECRETARY DEPARTMENT OF ELECTRONICS AND INFORMATION TECHNOLOGY (DEITY),New Delhi,IN | INDIAN INSTITUTE OF TECH GUWAHATI | THE SECRETARY DEPARTMENT OF ELECTRONICS AND INFORMATION TECH DEITY
Patent No. US20200024727A1
Engineering and Technology
Published
Filed 2018-06-12
Published 2020-01-23
SYSTEM, VORRICHTUNG UND VERFAHREN ZUR ÜBERWACHUNG EINES OBERFLÄCHENPROFILS UND DICKENMESSUNG IN DÜNNSCHICHTEN | SYSTÈME, APPAREIL ET PROCÉDÉ DE SURVEILLANCE DE PROFIL DE SURFACE ET DE MESURE D'ÉPAISSEUR DANS DES COUCHES MINCES | SYSTEM, APPARATUS AND METHOD FOR MONITORING OF SURFACE PROFILE AND THICKNESS MEASUREMENT IN THIN FILMS
SECRETARY DEPARTMENT OF ELECTRONICS AND INFORMATION TECH DEITY | INDIAN INSTITUTE OF TECH GUWAHATI
Patent No. EP3387482A4
Engineering and Technology
Published
Filed 2016-07-18
Published 2019-12-25
SYSTEM, VORRICHTUNG UND VERFAHREN ZUR ÜBERWACHUNG EINES OBERFLÄCHENPROFILS UND DICKENMESSUNG IN DÜNNSCHICHTEN | SYSTÈME, APPAREIL ET PROCÉDÉ DE SURVEILLANCE DE PROFIL DE SURFACE ET DE MESURE D'ÉPAISSEUR DANS DES COUCHES MINCES | SYSTEM, APPARATUS AND METHOD FOR MONITORING OF SURFACE PROFILE AND THICKNESS MEASUREMENT IN THIN FILMS
Secretary Department of Electronics and Information Technology (Deity),New Delhi 110003,IN,101637428 | Indian Institute of Technology Guwahati,Guwahati, Assam 781039,IN,101637247
Patent No. EP3387482A1
Engineering and Technology
Published
Filed 2016-07-18
Published 2018-10-17
SYSTÈME, APPAREIL ET PROCÉDÉ DE SURVEILLANCE DE PROFIL DE SURFACE ET DE MESURE D'ÉPAISSEUR DANS DES COUCHES MINCES | SYSTEM, APPARATUS AND METHOD FOR MONITORING OF SURFACE PROFILE AND THICKNESS MEASUREMENT IN THIN FILMS
印度电子与信息技术部(DEITY) | 印度理工学院古瓦哈提分校 | The Secretary Department Of Electronics And Information Technology (deity),IN | Indian Institute Of Technology Guwahati
Patent No. CN108700738A
Engineering and Technology
Published
Filed 2016-07-18
Published 2018-10-23
SYSTEM, APPARATUS AND METHOD FOR MONITORING OF SURFACE PROFILE AND THICKNESS MEASUREMENT IN THIN FILMS